Semiconductor wafer storage device

The utility model relates to the technical field of semiconductors, in particular to a semiconductor wafer storage device, which comprises a storage module used for storing a semiconductor wafer; and the rotating module is used for controlling rotation of the storage module. According to the semicon...

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1. Verfasser: SHA WEIZHONG
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The utility model relates to the technical field of semiconductors, in particular to a semiconductor wafer storage device, which comprises a storage module used for storing a semiconductor wafer; and the rotating module is used for controlling rotation of the storage module. According to the semiconductor wafer storage device, through the arrangement of the three stand columns, wafers are placed into the clamping groove positions of the stand columns from the opening positions of the three stand columns to be stored in batches, storage is more convenient by means of an up-and-down arrangement mode, and the storage amount is higher; a user can control the rotating module to rotate the storage module by a certain angle, and then the wafers are synchronously stored from the other opening, so that the space can be effectively saved, and the storage capacity of the wafers is effectively improved. And the whole wafer is more convenient to access. 本实用新型涉及半导体技术领域,具体为一种半导体晶圆存储装置,包括存储模块,用于存储半导体晶圆;旋转模块,用于控制存储模块的旋转。该半导体晶