Wireless intelligent sensor based on MEMS

A wireless intelligent sensor based on an MEMS comprises a hemispherical interlayer cover and a top frame fixed above the interlayer cover, a movable opening is formed in the middle of the interlayer cover, a hemispherical movable cover is arranged in the movable opening, the edge of the movable cov...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ZHOU WENYANG, ZHAN FANGQIANG, QIN YUHANG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:A wireless intelligent sensor based on an MEMS comprises a hemispherical interlayer cover and a top frame fixed above the interlayer cover, a movable opening is formed in the middle of the interlayer cover, a hemispherical movable cover is arranged in the movable opening, the edge of the movable cover is located in an interlayer of the interlayer cover, a movable ball rod is fixed to the upper surface of the movable cover in the movable opening, and the movable ball rod is fixed to the top frame. A micro electric telescopic rod is fixed on the lower surface of the movable cover opposite to the movable ball rod, a sensor is fixed at the telescopic end of the micro electric telescopic rod, the monitoring end of the sensor points to the ball center part of the interlayer cover, a ball head of the movable ball rod is located in a ball seat and can freely rotate in the ball seat, and a movable rod is fixed at the fixed end of the upper end of the ball seat; a cross-shaped sliding table is arranged in the top frame