Load Port loading platform compatible with multiple types of material boxes
The utility model provides a loading platform used for being compatible with multiple types of material boxes in a Load Port, and belongs to the technical field of semiconductor intelligent manufacturing, the Load Port comprises a vertical plate which is vertically arranged, a transverse plate is ho...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model provides a loading platform used for being compatible with multiple types of material boxes in a Load Port, and belongs to the technical field of semiconductor intelligent manufacturing, the Load Port comprises a vertical plate which is vertically arranged, a transverse plate is horizontally fixed on one side of the vertical plate, a movable window is arranged in the transverse plate, and the movable window is provided with a plurality of material boxes. A loading platform used for placing a wafer material box is arranged in the movable window, the loading platform comprises an n-shaped support fixed in the movable window and a movable plate arranged above the n-shaped support in a sliding mode, and a lead screw motor is fixed to a supporting arm of the n-shaped support through a first connecting plate; a first lead screw is fixed to an output shaft of the lead screw motor, a first nut is connected to the first lead screw in a threaded mode, a second connecting plate is fixed to the first nu |
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