Load Port loading platform compatible with multiple types of material boxes

The utility model provides a loading platform used for being compatible with multiple types of material boxes in a Load Port, and belongs to the technical field of semiconductor intelligent manufacturing, the Load Port comprises a vertical plate which is vertically arranged, a transverse plate is ho...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: QIU HAIZHOU, GONG YU, ZHANG RUIWEN
Format: Patent
Sprache:chi ; eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The utility model provides a loading platform used for being compatible with multiple types of material boxes in a Load Port, and belongs to the technical field of semiconductor intelligent manufacturing, the Load Port comprises a vertical plate which is vertically arranged, a transverse plate is horizontally fixed on one side of the vertical plate, a movable window is arranged in the transverse plate, and the movable window is provided with a plurality of material boxes. A loading platform used for placing a wafer material box is arranged in the movable window, the loading platform comprises an n-shaped support fixed in the movable window and a movable plate arranged above the n-shaped support in a sliding mode, and a lead screw motor is fixed to a supporting arm of the n-shaped support through a first connecting plate; a first lead screw is fixed to an output shaft of the lead screw motor, a first nut is connected to the first lead screw in a threaded mode, a second connecting plate is fixed to the first nu