Nano-imprinting jointed board equipment

The utility model discloses nanoimprint plate splicing equipment which comprises an exposure device, a shielding device, an imprint mechanism, a soft film fixing mechanism and a carrying seat, an exposure lamp is arranged on the exposure device; the shielding device is arranged below the exposure de...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HE ZHAO, SONG CHONGSHUN, SHI XIAOHUA, LIU XIAOCHENG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model discloses nanoimprint plate splicing equipment which comprises an exposure device, a shielding device, an imprint mechanism, a soft film fixing mechanism and a carrying seat, an exposure lamp is arranged on the exposure device; the shielding device is arranged below the exposure device, and the vertical projection of the shielding device and the exposure device is partially or completely covered. The utility model has the beneficial effects that the exposure device and the shielding device are arranged and are matched with the carrying seat, the imprinting mechanism and the soft film fixing mechanism, so that a certain part of patterns on the substrate can be selectively imprinted, a plurality of single patterns are spliced or a plurality of patterns are spliced together, the structure is simple, the practicability is strong, the imprinting efficiency is high, and the splicing effect is good. 本实用新型公开了一种纳米压印拼板设备,包括:曝光装置、遮挡装置、压印机构、软膜固定机构、载座;所述曝光装置上设置有曝光灯;所述遮挡装置设置在所述曝光装置的下方,所述遮挡装置与所述曝光装置垂直投影部分或