Wafer suspension stage device

A wafer suspension stage device comprises a stage body, a cavity is formed in the stage body, a plurality of dense air holes are formed in the top surface of the cavity, and the air holes penetrate through the top surface of the cavity and are exposed out of the upper surface of the stage body; the...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	ZHENG KUNXIAN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS SEMICONDUCTOR DEVICES TESTING
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