Micro differential pressure sensor
The utility model relates to a sensor, in particular to a micro differential pressure sensor, which comprises a mems thermal flow sensor and further comprises a detection flow channel, the detection flow channel comprises an air inlet hole, a first throttling hole, a detection hole, a second throttl...
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| Format: | Patent |
| Sprache: | chi ; eng |
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| Zusammenfassung: | The utility model relates to a sensor, in particular to a micro differential pressure sensor, which comprises a mems thermal flow sensor and further comprises a detection flow channel, the detection flow channel comprises an air inlet hole, a first throttling hole, a detection hole, a second throttling hole and an air outlet hole which are sequentially arranged, and the diameter of the first throttling hole and the diameter of the second throttling hole are smaller than those of the air inlet hole, the detection hole and the air outlet hole. The diameter of the first throttling hole is the same as that of the second throttling hole, the diameter of the air inlet hole is the same as that of the air outlet hole, and the mems thermal flow sensor is installed in the detection hole. When the pressure of an air inlet and the pressure of an air outlet of the sensor are different, airflow flows through the sensor through a small throttling hole and a detection hole, the pressure of an air inlet hole and the pressure |
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