Single crystal furnace thermal field dustproof device and thermal field dustproof single crystal furnace

The utility model belongs to the technical field of monocrystalline silicon production equipment, and particularly relates to a thermal field dustproof device of a single crystal furnace and a thermal field dustproof single crystal furnace. The utility model relates to a dustproof device for a therm...

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Bibliographische Detailangaben
Hauptverfasser: LI FEIJIAN, YANG CHUNXIANG, ZHANG PENG, GONG XIAOLUN, LU JIANHUA, GUAN SHUJUN
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:The utility model belongs to the technical field of monocrystalline silicon production equipment, and particularly relates to a thermal field dustproof device of a single crystal furnace and a thermal field dustproof single crystal furnace. The utility model relates to a dustproof device for a thermal field of a single crystal furnace, which is used for reducing dust and impurities from falling into the thermal field when single crystals are combined, and comprises an upper thermal insulation cylinder positioned above a middle-lower thermal insulation cylinder, and a dustproof cover plate positioned above the upper thermal insulation cylinder and used for sealing an opening of the upper thermal insulation cylinder. According to the thermal field structure, the upper thermal insulation cylinder is arranged on the lower thermal insulation cylinder in the thermal field structure, the dustproof cover plate is arranged on the upper thermal insulation cylinder, the dustproof cover plate is used for sealing an openi