Single-probe structure of vacuum evaporator

The utility model provides a single-probe structure of a vacuum evaporator, the single-probe structure penetrates through the left side edge or the right side edge of a main cavity of the vacuum coating machine, and the single-probe structure is horizontally arranged, is located above a coating pot...

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1. Verfasser: XUE MENGXIAO
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The utility model provides a single-probe structure of a vacuum evaporator, the single-probe structure penetrates through the left side edge or the right side edge of a main cavity of the vacuum coating machine, and the single-probe structure is horizontally arranged, is located above a coating pot and is used for detecting the thickness of a coating film layer of a coated workpiece. The single-probe structure comprises a detection part, a cooling pipe and a fixing piece, the detection part is circular, the upper part of the cooling pipe is provided with two parallel cooling pipe parts and penetrates through the fixing piece to be fixedly connected with the fixing piece, the lower part of the cooling pipe is in an arc shape with the angle larger than 90 degrees and smaller than 180 degrees, and the lower part of the cooling pipe is provided with an arc-shaped groove. The detection part and the lower part of the cooling pipe are integrated, and the single-probe structure and the side wall of a main cavity of t