Magnetron sputtering vacuum coating device

The magnetron sputtering vacuum coating device comprises a supporting frame, a movable box is movably installed on one side of the bottom end of the interior of the supporting frame, a storage box is installed at the bottom end of the interior of the movable box, and an inert gas tank is installed a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	WANG HONGFEI, XIONG LANG, LIN MENGTIAN, ZHANG YEFANG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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