Magnetron sputtering vacuum chamber capable of rapidly cooling
The magnetron sputtering vacuum cabin comprises a supporting frame, a cooling device is installed in the middle of the bottom end of the supporting frame, an air valve is installed in the middle of one end of the cooling device, and a metal arc-shaped plate is installed on one side of the top of the...
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Zusammenfassung: | The magnetron sputtering vacuum cabin comprises a supporting frame, a cooling device is installed in the middle of the bottom end of the supporting frame, an air valve is installed in the middle of one end of the cooling device, and a metal arc-shaped plate is installed on one side of the top of the supporting frame. An exhaust pipe is installed in the middle of the top of the metal arc-shaped plate, and an arc-shaped sliding groove is formed in the bottom end of one side of the metal arc-shaped plate. According to the vacuum coating device, the cooling device is arranged at the bottom of the supporting frame, after the surface of a coated part is coated, a worker adds air into the vacuum chamber through the exhaust pipe, makes contact with the vacuum chamber in a vacuum state and then can open the air valve and start the cooling device, so that the cooling device can cool the interior of the vacuum chamber; therefore, the plated part in the vacuum cabin can be cooled, the cooling process of the plated part i |
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