Magnetron sputtering device convenient to use
The magnetron sputtering device comprises a machine body, an electric box is installed on one side of the bottom of one end of the machine body, a control panel is installed on one side of the middle position of one end of the machine body, and side protection plates are installed on the two sides o...
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| creator | WANG HONGFEI XIONG LANG LIN MENGTIAN ZHANG YEFANG |
| description | The magnetron sputtering device comprises a machine body, an electric box is installed on one side of the bottom of one end of the machine body, a control panel is installed on one side of the middle position of one end of the machine body, and side protection plates are installed on the two sides of the machine body. A sealing door is rotatably installed at the end, close to the control panel, of the machine body through hinges, an air pipe is installed in the middle of the end, away from the control panel, of the machine body, and a first electronic air valve is installed at the end, close to the sealing door, of the air pipe; a motor is installed in the middle of the bottom of the sealed cabin, a plated part placing rod is installed at the output end of the motor, an exhaust fan is installed in the middle of the end, away from the sealing door, of the bottom of the sealed cabin, and a second electronic air valve is installed in the middle of the end, away from the sealing door, of the inner bottom of the m |
| format | Patent |
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A sealing door is rotatably installed at the end, close to the control panel, of the machine body through hinges, an air pipe is installed in the middle of the end, away from the control panel, of the machine body, and a first electronic air valve is installed at the end, close to the sealing door, of the air pipe; a motor is installed in the middle of the bottom of the sealed cabin, a plated part placing rod is installed at the output end of the motor, an exhaust fan is installed in the middle of the end, away from the sealing door, of the bottom of the sealed cabin, and a second electronic air valve is installed in the middle of the end, away from the sealing door, of the inner bottom of the m</description><language>chi ; eng</language><subject>CHEMICAL SURFACE TREATMENT ; CHEMISTRY ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING MATERIAL WITH METALLIC MATERIAL ; COATING METALLIC MATERIAL ; DIFFUSION TREATMENT OF METALLIC MATERIAL ; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL ; METALLURGY ; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><creationdate>2022</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20220809&DB=EPODOC&CC=CN&NR=217149292U$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76290</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20220809&DB=EPODOC&CC=CN&NR=217149292U$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>WANG HONGFEI</creatorcontrib><creatorcontrib>XIONG LANG</creatorcontrib><creatorcontrib>LIN MENGTIAN</creatorcontrib><creatorcontrib>ZHANG YEFANG</creatorcontrib><title>Magnetron sputtering device convenient to use</title><description>The magnetron sputtering device comprises a machine body, an electric box is installed on one side of the bottom of one end of the machine body, a control panel is installed on one side of the middle position of one end of the machine body, and side protection plates are installed on the two sides of the machine body. A sealing door is rotatably installed at the end, close to the control panel, of the machine body through hinges, an air pipe is installed in the middle of the end, away from the control panel, of the machine body, and a first electronic air valve is installed at the end, close to the sealing door, of the air pipe; a motor is installed in the middle of the bottom of the sealed cabin, a plated part placing rod is installed at the output end of the motor, an exhaust fan is installed in the middle of the end, away from the sealing door, of the bottom of the sealed cabin, and a second electronic air valve is installed in the middle of the end, away from the sealing door, of the inner bottom of the m</description><subject>CHEMICAL SURFACE TREATMENT</subject><subject>CHEMISTRY</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING MATERIAL WITH METALLIC MATERIAL</subject><subject>COATING METALLIC MATERIAL</subject><subject>DIFFUSION TREATMENT OF METALLIC MATERIAL</subject><subject>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</subject><subject>METALLURGY</subject><subject>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2022</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZND1TUzPSy0pys9TKC4oLSlJLcrMS1dISS3LTE5VSM7PK0vNy0zNK1EoyVcoLU7lYWBNS8wpTuWF0twMSm6uIc4euqkF-fGpxQWJyalAw-Kd_YwMzQ1NLI0sjUJDjYlSBABUwytr</recordid><startdate>20220809</startdate><enddate>20220809</enddate><creator>WANG HONGFEI</creator><creator>XIONG LANG</creator><creator>LIN MENGTIAN</creator><creator>ZHANG YEFANG</creator><scope>EVB</scope></search><sort><creationdate>20220809</creationdate><title>Magnetron sputtering device convenient to use</title><author>WANG HONGFEI ; XIONG LANG ; LIN MENGTIAN ; ZHANG YEFANG</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_CN217149292UU3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>chi ; eng</language><creationdate>2022</creationdate><topic>CHEMICAL SURFACE TREATMENT</topic><topic>CHEMISTRY</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING MATERIAL WITH METALLIC MATERIAL</topic><topic>COATING METALLIC MATERIAL</topic><topic>DIFFUSION TREATMENT OF METALLIC MATERIAL</topic><topic>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</topic><topic>METALLURGY</topic><topic>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</topic><toplevel>online_resources</toplevel><creatorcontrib>WANG HONGFEI</creatorcontrib><creatorcontrib>XIONG LANG</creatorcontrib><creatorcontrib>LIN MENGTIAN</creatorcontrib><creatorcontrib>ZHANG YEFANG</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>WANG HONGFEI</au><au>XIONG LANG</au><au>LIN MENGTIAN</au><au>ZHANG YEFANG</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Magnetron sputtering device convenient to use</title><date>2022-08-09</date><risdate>2022</risdate><abstract>The magnetron sputtering device comprises a machine body, an electric box is installed on one side of the bottom of one end of the machine body, a control panel is installed on one side of the middle position of one end of the machine body, and side protection plates are installed on the two sides of the machine body. A sealing door is rotatably installed at the end, close to the control panel, of the machine body through hinges, an air pipe is installed in the middle of the end, away from the control panel, of the machine body, and a first electronic air valve is installed at the end, close to the sealing door, of the air pipe; a motor is installed in the middle of the bottom of the sealed cabin, a plated part placing rod is installed at the output end of the motor, an exhaust fan is installed in the middle of the end, away from the sealing door, of the bottom of the sealed cabin, and a second electronic air valve is installed in the middle of the end, away from the sealing door, of the inner bottom of the m</abstract><oa>free_for_read</oa></addata></record> |
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| language | chi ; eng |
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| subjects | CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
| title | Magnetron sputtering device convenient to use |
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