Magnetron sputtering device convenient to use

The magnetron sputtering device comprises a machine body, an electric box is installed on one side of the bottom of one end of the machine body, a control panel is installed on one side of the middle position of one end of the machine body, and side protection plates are installed on the two sides o...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: WANG HONGFEI, XIONG LANG, LIN MENGTIAN, ZHANG YEFANG
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:The magnetron sputtering device comprises a machine body, an electric box is installed on one side of the bottom of one end of the machine body, a control panel is installed on one side of the middle position of one end of the machine body, and side protection plates are installed on the two sides of the machine body. A sealing door is rotatably installed at the end, close to the control panel, of the machine body through hinges, an air pipe is installed in the middle of the end, away from the control panel, of the machine body, and a first electronic air valve is installed at the end, close to the sealing door, of the air pipe; a motor is installed in the middle of the bottom of the sealed cabin, a plated part placing rod is installed at the output end of the motor, an exhaust fan is installed in the middle of the end, away from the sealing door, of the bottom of the sealed cabin, and a second electronic air valve is installed in the middle of the end, away from the sealing door, of the inner bottom of the m