Clamping plug device for wafer annealing

The utility model discloses a clamping plug device for wafer annealing, which belongs to the technical field of semiconductor material processing, and comprises four clamping groove rods, the four clamping groove rods define an inverted trapezoidal wafer containing chamber, the end parts of two adjacent clamping groove rods are fixed by using a connecting rod, a plurality of clamping grooves are arranged on the clamping groove rods at certain intervals, and the clamping groove rods are connected with the clamping groove rods. According to the utility model, the clamping plug is made of a quartz material and has the advantages of high temperature resistance and low possibility of deformation, and the clamping grooves on the clamping groove rods effectively ensure the independent placement of wafers, so that the wafers are prevented from being contacted and adhered. 本实用新型公开一种用于晶片退火的卡塞装置，属于半导体材料加工技术领域，包括四根卡槽杆，所述四根卡槽杆围合成倒梯形状的盛片室，相邻两根卡槽杆的端部使用连接杆进行固定，卡槽杆上设置有若干间隔一定距离的卡槽，相邻两根卡槽杆上的卡槽位置相互对称，本实用新型利用石英材料制造卡塞其具有耐高温且不易变形的优