Rotary cathode magnetron sputtering coating unit

The utility model relates to a rotating cathode magnetron sputtering coating unit, which comprises a cathode target material, cathode assembling seats, two side shielding plates and a plurality of auxiliary shielding plates, the periphery of the cathode target material is cylindrical, and two ends o...

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Bibliographische Detailangaben
Hauptverfasser: SUN WEIMING, WU JINGQUAN, YI HUOGEN, GUO ZHENHAO, SUI LINGJIE
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:The utility model relates to a rotating cathode magnetron sputtering coating unit, which comprises a cathode target material, cathode assembling seats, two side shielding plates and a plurality of auxiliary shielding plates, the periphery of the cathode target material is cylindrical, and two ends of the cathode target material in the length direction are respectively assembled on the cathode assembling seats in a fixed-axis rotating manner; and the two side shielding plates are parallel to each other and are respectively arranged on two sides of the cathode target material in the moving direction of the coating substrate. One end of the auxiliary shielding plate is detachably assembled on the side shielding plate, and the other end of the auxiliary shielding plate extends towards the space between the cathode target material and the coating substrate. According to the utility model, through the arrangement of the auxiliary shielding plate, when the coating substrate runs into the coating cavity and starts co