Flushing equipment capable of avoiding overlapping of silicon wafers

The utility model provides flushing equipment capable of avoiding overlapping of silicon wafers, and belongs to the technical field of silicon wafer cleaning. The flushing equipment capable of avoiding overlapping of the silicon wafers comprises the shell assembly and the cleaning assembly, a user c...

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1. Verfasser: GONG DACHENG
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The utility model provides flushing equipment capable of avoiding overlapping of silicon wafers, and belongs to the technical field of silicon wafer cleaning. The flushing equipment capable of avoiding overlapping of the silicon wafers comprises the shell assembly and the cleaning assembly, a user can adjust the height of a telescopic rod according to the thickness of the silicon wafers, then the silicon wafers are placed on the surface of a conveyor, and meanwhile one end of the telescopic rod can block the silicon wafers to move; therefore, the phenomenon that the silicon wafers are not cleaned thoroughly due to overlapping of the silicon wafers is avoided, then the silicon wafers are flushed by the flushing part, water after flushing flows into the filter box through the water outlet, the filter box filters the silicon wafers, water circulation can be achieved, waste of water resources is prevented, the silicon wafers can be dried by the drying part, and the service life of the silicon wafers is prolonged.