Cleaning device for indium phosphide processing

The utility model relates to the technical field of indium phosphide, in particular to a cleaning device for indium phosphide processing. According to the technical scheme, the device comprises a bottom box, a liquid storage box and a liquid collecting box, an air odor removing device is installed o...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ZHAN ZEXING, MENG KUIZHI, ZHAN XIANHUA, ZHAN ZERUI, YU HUIPING
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:The utility model relates to the technical field of indium phosphide, in particular to a cleaning device for indium phosphide processing. According to the technical scheme, the device comprises a bottom box, a liquid storage box and a liquid collecting box, an air odor removing device is installed on one side of the exterior of the bottom box, a bottom plate is installed at the bottom of the bottom box, the liquid collecting box is installed in the bottom box, a liquid discharging pipe is installed on the top of the liquid collecting box, an exhaust pipe is installed on one side of the top of the liquid collecting box, and the exhaust pipe is connected with the air odor removing device; a top box is installed at the top of the bottom box, a spraying frame is installed at the top in the top box, partition plates are installed on the two sides in the top box, heating wires are installed on one sides of the partition plates, and a liquid storage box is installed at the top of the top box. According to the indium