Leveling mechanism for auxiliary furnace chamber of single crystal furnace

The utility model relates to a leveling mechanism for an auxiliary furnace chamber of a single crystal furnace. The leveling mechanism comprises a fixing part, a horizontal monitoring part, a control part and a self-adaptive leveling part, the auxiliary furnace chamber inclines due to lifting motion...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: YUAN HUAZHONG, XIE JIANZHOU, SHI BINGBING, ZHU YIMING, LAI DIWEN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model relates to a leveling mechanism for an auxiliary furnace chamber of a single crystal furnace. The leveling mechanism comprises a fixing part, a horizontal monitoring part, a control part and a self-adaptive leveling part, the auxiliary furnace chamber inclines due to lifting motion, the horizontal monitoring component monitors the inclination angle and compares the inclination angle with the zero position, and a result is fed back to the control component. And the control component collects the signal sent by the horizontal monitoring component, processes the signal to generate control data, and sends a control instruction to the self-adaptive leveling component. In the self-adaptive leveling component, a motor generates driving force after receiving a control instruction, the driving force is decelerated by a speed reducer to drive a lead screw to rotate, the lead screw drives a tension arm fixed with a lead screw nut to move back and forth along a linear guide rail, and a connecting block