Argon inlet control device for single crystal furnace
The utility model provides an argon gas inlet control device for a single crystal furnace, which comprises four gas inlet circuits, when normal crystal pulling is switched to a special crystal pulling state, an auxiliary furnace flow control gas circuit of a first gas inlet circuit and a third gas i...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model provides an argon gas inlet control device for a single crystal furnace, which comprises four gas inlet circuits, when normal crystal pulling is switched to a special crystal pulling state, an auxiliary furnace flow control gas circuit of a first gas inlet circuit and a third gas inlet circuit are switched to a main furnace flow control gas circuit of a second gas inlet circuit and an electric quick gas charging circuit of the first gas inlet circuit, and under the matching action of the mass flow controller, the electromagnetic valve and other components, the stability of argon supply during production switching is ensured. When electrified parts such as an electromagnetic valve work abnormally or are powered off, the first gas inlet line, the auxiliary furnace manual emergency gas circuit and the main furnace manual emergency gas circuit of the second gas inlet line are switched, inert atmosphere protection of the auxiliary furnace chamber and the main furnace chamber is achieved through m |
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