High-performance silicon carbide material corrosion furnace

The utility model discloses a high-performance silicon carbide material corrosion furnace, and belongs to the technical field of silicon carbide material production. Comprising a heating furnace and a crucible located in a furnace cavity of the heating furnace. A basket body with meshes is placed in...

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Bibliographische Detailangaben
Hauptverfasser: ZHAO LIXIA, SONG HONGYING, YANG MUXUAN, TIAN XINLONG, JIA JIE, WANG GUANGYAO, TIAN LEI, HOU XIAORUI, YANG JIN, PAN LINRU, YIN XIANGKAI, HAN GUOXIN, MA BAO
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The utility model discloses a high-performance silicon carbide material corrosion furnace, and belongs to the technical field of silicon carbide material production. Comprising a heating furnace and a crucible located in a furnace cavity of the heating furnace. A basket body with meshes is placed in the crucible, a plurality of layers of openable screen frames are arranged in the basket body at intervals, and silicon carbide materials are placed in the screen frames; a stirring device and a temperature detection device are arranged between every two adjacent layers of screen frames; according to the utility model, the synchronous corrosion of a plurality of silicon carbide materials is realized, the corrosion efficiency is improved, the control precision of the corrosion process is high, and compared with the traditional corrosion furnace, the device has the characteristics of controllable time and temperature, high efficiency, convenience and safety. 本实用新型公开了一种高性能碳化硅材料腐蚀炉,属于碳化硅材料生产技术领域;包括加热炉和位于加热炉炉腔内的坩埚;所述坩埚