Vertical magnetron sputtering coating tool disc convenient to mount

The utility model relates to a tool disc, in particular to a vertical magnetron sputtering coating tool disc convenient to install, which comprises a disc body, the disc body is provided with an opening and a cavity, and the center of the disc body is further provided with a first assembly hole pene...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ZHANG XINGXIANG, LU XIAOFENG, ZHANG YING, WU JIANPEI, KANG QIANG, SONG HUI, MA YANG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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