Vertical magnetron sputtering coating tool disc convenient to mount
The utility model relates to a tool disc, in particular to a vertical magnetron sputtering coating tool disc convenient to install, which comprises a disc body, the disc body is provided with an opening and a cavity, and the center of the disc body is further provided with a first assembly hole pene...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model relates to a tool disc, in particular to a vertical magnetron sputtering coating tool disc convenient to install, which comprises a disc body, the disc body is provided with an opening and a cavity, and the center of the disc body is further provided with a first assembly hole penetrating through the disc body; the cover plate is fixedly connected to the wall surface forming the opening, and a first insertion hole penetrating through the cover plate is formed in the center of the cover plate; one end of the first rotating piece is inserted into the first assembly hole; one end of the first rotating piece is fixedly connected with one end of the base plate, and the end, away from the first rotating rod, of the base plate is connected with the first rotating piece in a clamped mode. According to the utility model, the advantages of convenience in movement, simple structure, uniformity in coating and convenience in installation can be realized by effectively utilizing the structural configurati |
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