Device for positioning carrier plate in CVD (chemical vapor deposition) process cavity

The utility model discloses a device for positioning a support plate in a CVD (chemical vapor deposition) process cavity, which comprises positioning mechanisms, a sensor and a conveying mechanism, the conveying mechanism is used for conveying the support plate to a preset position, the sensor is used for positioning the position of the support plate, the positioning mechanisms are arranged on two sides of the advancing direction of the support plate, and the sensors are arranged on the two sides of the advancing direction of the support plate. And actions are made according to the position information fed back by the sensor, and the vertex of the carrier plate is positioned, so that the carrier plate is limited at a target position. The device for positioning the support plate in the CVD process cavity has the advantages of compact structure, simplicity in operation, high positioning accuracy and the like, realizes rapid and accurate positioning of the support plate, and improves the stability and the unifor