Auxiliary device for testing resistivity of monocrystalline silicon

The utility model provides an auxiliary device for testing the resistivity of monocrystalline silicon, which comprises a probe frame and a probe, the probe is arranged at one end of the probe frame, and the probe is used for detecting the resistivity of the monocrystalline silicon. According to the...

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Bibliographische Detailangaben
Hauptverfasser: LI RUI, WANG MIAO, YANG QIANG, MA FEI, ZHOU HONGBANG, JIA HAIYANG, ZHANG QIANG, LOU ZHONGSHI, ZHANG HENG, ZHEN XINLEI
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The utility model provides an auxiliary device for testing the resistivity of monocrystalline silicon, which comprises a probe frame and a probe, the probe is arranged at one end of the probe frame, and the probe is used for detecting the resistivity of the monocrystalline silicon. According to the utility model, the problems that in the prior art, when resistivity measurement is carried out on monocrystalline silicon, a test arm is short, and a monocrystalline silicon sample with a large size and diameter cannot be measured are solved; if a test arm is lengthened, the measurement work efficiency is reduced, the stability is poor, and the measurement precision cannot be ensured; according to the auxiliary device for testing the resistivity of the monocrystalline silicon, the testing arm can be adjusted according to the diameter requirement of the measured monocrystalline silicon sample, adjustment is convenient, a large amount of replacement operation is not needed, the measurement efficiency and the measurem