Locking device for ion source
The utility model discloses a locking device for an ion source, which comprises an ion source assembly, an interface disc assembly and a locking assembly, the ion source assembly comprises a shell, one end of the shell is provided with an opening, the opening end of the shell is in butt joint with t...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model discloses a locking device for an ion source, which comprises an ion source assembly, an interface disc assembly and a locking assembly, the ion source assembly comprises a shell, one end of the shell is provided with an opening, the opening end of the shell is in butt joint with the interface disc assembly, and the locking assembly comprises a clamping shaft and a clamping seat. The ion source is installed and positioned through the locking assembly, one of the clamping shaft and the clamping seat is arranged at the opening end of the shell of the ion source assembly, the other one of the clamping shaft and the clamping seat is arranged on the interface disc assembly, the clamping shaft is initially located at the first angle position, at the moment, the clamping shaft can be connected with a clamping groove in the clamping seat in an inserted mode, and the shell is in butt joint with the interface disc assembly; the clamping shaft is manually rotated to the second angle position, so that t |
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