Silicon wafer loading tool capable of protecting edge of silicon wafer
The utility model provides a wafer mounting tool capable of protecting the edge of a silicon wafer, and belongs to the field of silicon wafer mounting, the wafer mounting tool capable of protecting the edge of the silicon wafer comprises a mounting mechanism, a fixing mechanism, a wafer mounting mec...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model provides a wafer mounting tool capable of protecting the edge of a silicon wafer, and belongs to the field of silicon wafer mounting, the wafer mounting tool capable of protecting the edge of the silicon wafer comprises a mounting mechanism, a fixing mechanism, a wafer mounting mechanism and a fixing mechanism, the wafer mounting mechanism comprises a rack, a support, a first electric push rod, a fixing plate, a sliding rod, a pressing plate and a guide wheel, the supports are fixed to the two sides of one end of the rack, the support is fixed to one end of the rack, one second electric push rod is fixed to the surface of the support, and the other second electric push rod is fixed to the bottom of the rack. The output end of the second electric push rod penetrates through the interior of the rack in a sliding mode, the clamping plates are fixed to the output end of the second electric push rod, and the wafer mounting tool capable of protecting the edge of the silicon wafer can automatically |
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