Semiconductor heating and developing device

The utility model provides a semiconductor heating and developing device, and aims to solve the problems that in the prior art, a baking device for a baking process and a developing device for developing are mutually independent, so that other heating devices need to be arranged to heat a developing solution under the condition that excessive heat is continuously generated and wasted in the baking process; the utility model provides a novel semiconductor heating and developing device in which a baking unit and a developing unit are communicated with each other, so that excess heat generated when the baking unit bakes a substrate can be transmitted to the developing unit through a connecting pipeline between the baking unit and the developing unit; according to the developing unit, the temperature of the developing solution stored in the buffer groove in the developing unit is adjusted by utilizing the heat preservation effect of the heating groove which is uniquely designed in the developing unit, so that the