Defect detection device for transparent medium thin layer

The utility model relates to the field of defect detection, in particular to a defect detection device for a transparent medium thin layer. The utility model discloses a defect detection device for a transparent medium thin layer, which comprises a light source unit, a fixing mechanism and a photoel...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LIN HONGYI, CHEN YIMING, BAO SHANGFENG, ZHOU XIANJIAN, SONG LUMING, MU RUIZHEN, QIN HUAIYUAN, SUN DONG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model relates to the field of defect detection, in particular to a defect detection device for a transparent medium thin layer. The utility model discloses a defect detection device for a transparent medium thin layer, which comprises a light source unit, a fixing mechanism and a photoelectric detector, the fixing mechanism is used for fixing the transparent medium thin layer to be detected, and the light source unit is used for providing incident light which is incident to the surface of the transparent medium thin layer to be detected at a total reflection angle or larger than the total reflection angle; the photoelectric detector is used for detecting whether diffuse scattering light corresponding to the incident light is emitted from the transparent medium thin layer to be detected. The device can effectively and reliably detect tiny defects in the transparent medium thin layer, is convenient to operate, high in detection speed and efficiency, simple in structure and low in cost, and saves a l