Nanoparticle-metamaterial sinusoidal grating multi-scale near-field coupled SERS (Surface Enhanced Raman Scattering) substrate

The utility model relates to a nanoparticle-metamaterial sinusoidal grating multi-scale near-field coupled SERS (Surface Enhanced Raman Scattering) substrate. The SERS substrate structurally comprises a SiO2 base layer, a metamaterial sinusoidal grating and a noble metal nanoparticle layer, wherein the metamaterial sinusoidal grating is positioned on the upper surface of the SiO2 base layer; the noble metal nanoparticle layer is attached to the upper surface of the metamaterial sinusoidal grating; the metamaterial sinusoidal grating comprises a photoresist lining layer and a metal-dielectric multilayer micro-nano structure, wherein the photoresist lining layer is attached to the SiO2 base layer and forms a sinusoidal grating pattern, and the metal-dielectric multilayer micro-nano structure is deposited on the surface of the photoresist lining layer. According to the metal-dielectric multilayer micro-nano structure, a precious metal film layer and a dielectric film layer deposited on the precious metal film la