Rectification plate, fluid introduction device, and film formation device
Provided is a rectifying plate capable of suppressing fluctuations in film formation speed on an object to be subjected to film formation. According to one embodiment, a rectifying plate is provided so as to face a plurality of nozzles that eject a fluid, and has a plurality of high-flow-path-resist...
Gespeichert in:
Hauptverfasser: | , , , , |
---|---|
Format: | Patent |
Sprache: | chi ; eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | Provided is a rectifying plate capable of suppressing fluctuations in film formation speed on an object to be subjected to film formation. According to one embodiment, a rectifying plate is provided so as to face a plurality of nozzles that eject a fluid, and has a plurality of high-flow-path-resistance regions that have nozzle-facing regions that respectively face the plurality of nozzles, the low-flow-path-resistance regions that have nozzle-facing regions that face the plurality of nozzles, and the high-flow-path-resistance regions that have nozzle-facing regions that face the plurality of nozzles, and the high-flow-path-resistance regions that have nozzle-facing regions that face the plurality of nozzles. And a plurality of first through-holes surrounding each of the plurality of high-flow-resistance regions, the plurality of first through-holes being formed, and the flow resistance of the first through-holes being smaller than that of the high-flow-resistance regions.
提供能够抑制向成膜对象物的成膜速度的变动的整流板。根据实施方式,整流板具 |
---|