Piezoelectric micro-electro-mechanical structure

The embodiment of the utility model relates to a piezoelectric micro-electro-mechanical structure. A piezoelectric microelectromechanical structure includes: a piezoelectric stack having a main extension in a horizontal plane and a varying cross-sectional thickness in a plane transverse to the horizontal plane; wherein the piezoelectric stack is formed from a stack arrangement of a bottom electrode region, a piezoelectric material region disposed on the bottom electrode region, and a top electrode region disposed on the piezoelectric material region; wherein, due to the varying cross-sectional thickness, the piezoelectric material region has a first thickness in the first region along a vertical axis transverse to the horizontal plane, and the piezoelectric material region has a second thickness in the second region along the vertical axis, the second thickness being less than the first thickness. According to the embodiment of the invention, the piezoelectric performance improvement in two aspects of piezoel