Efficient and energy-saving silicon carbide wafer cleaning device

The utility model discloses an efficient energy-saving silicon carbide wafer cleaning device in the technical field of cleaning devices, which comprises a cleaning box, a cleaning mechanism is arranged in the cleaning box, the cleaning mechanism is composed of two discs, a support, a net box and a f...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SUN DAFANG, LI YOUQUN, ZHUO SHIYI, CHEN HUI, ZHOU JIE, WANG SHENG, HE XIANHAN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CLEANING CLEANING IN GENERAL PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL TRANSPORTING
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