Efficient and energy-saving silicon carbide wafer cleaning device
The utility model discloses an efficient energy-saving silicon carbide wafer cleaning device in the technical field of cleaning devices, which comprises a cleaning box, a cleaning mechanism is arranged in the cleaning box, the cleaning mechanism is composed of two discs, a support, a net box and a f...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model discloses an efficient energy-saving silicon carbide wafer cleaning device in the technical field of cleaning devices, which comprises a cleaning box, a cleaning mechanism is arranged in the cleaning box, the cleaning mechanism is composed of two discs, a support, a net box and a fixing frame, and the two discs are fixedly connected through a connecting shaft; a plurality of supports are arranged on the side edges of the two discs at equal intervals, the supports on the two discs are arranged in a one-to-one correspondence mode, a connecting rod is fixedly connected between every two corresponding supports, the connecting rod is movably sleeved with a sleeve, and the net box is fixedly connected to the lower side of the sleeve; in the cleaning process, when the net box moves to be separated from the water surface, water sprayed out of the spray head washes the wafer in the net box, so that the adhesive force of impurities and dirt on the wafer is reduced, when the net box moves into the wate |
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