Substrate processing system

The utility model provides a substrate processing system. The substrate processing system is provided with a feeding part, a batch processing part, a single-chip processing part, an interface part and a discharging part, the feeding unit includes a first placement unit on which a carrier is placed, and the carrier accommodates a plurality of substrates. The batch processing unit processes a substrate group including a plurality of substrates together. The single-sheet processing unit processes the substrates included in the substrate group one by one. The interface section transfers substrates one by one between the batch processing section and the single-chip processing section. The feeding unit includes a second placement unit on which a carrier for accommodating the substrate processed by the single-sheet processing unit can be placed. In addition, the feeding part, the batch processing part, the interface part, the single-piece processing part and the discharging part are arranged in sequence. According t