Polycrystalline silicon reduction furnace with 48 pairs of rods

The utility model discloses a polycrystalline silicon reduction furnace with 48 pairs of rods, which is characterized in that a plurality of silicon rods are sequentially arranged in 12, 18, 24 and 36 modes, one side of the inner wall of the reduction furnace is fixedly connected with a temperature...

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Bibliographische Detailangaben
Hauptverfasser: LI YONGMING, HU CHONGGANG, HUANG JIN, CUI XUEWEI, LIN YANDONG, LIU XIAO
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The utility model discloses a polycrystalline silicon reduction furnace with 48 pairs of rods, which is characterized in that a plurality of silicon rods are sequentially arranged in 12, 18, 24 and 36 modes, one side of the inner wall of the reduction furnace is fixedly connected with a temperature sensor through a support, one side of the reduction furnace is communicated with an observation hole, and one side of the observation hole is attached with double-layer vacuum glass. The utility model relates to the technical field of polycrystalline silicon reduction furnaces, through the cooperation among the silicon rod, the observation hole and the temperature sensor, the device can reduce the actual power consumption below 45kwh/kg.Si, the power consumption index reaches the international advanced level, a user only needs to observe through the double-layer vacuum glass, and the operation is simple and convenient. A user can take down the bolts to replace the double-layer vacuum glass, the temperature sensor c