Etching jig for silicon component

The utility model discloses an etching jig for a silicon component. Comprising a lower disc for placing a silicon component, an upper disc which is detachably arranged on the lower disc and can rotate on the lower disc under the action of external force, and a fixing device which is arranged between the upper disc and the lower disc and is used for fixing the position of the upper disc when the upper disc rotates to a preset position under the action of external force. 本实用新型公开了一种硅部件用刻蚀治具，包括用于放置硅部件的下盘、可拆卸设于所述下盘上受自身重力将硅部件抵顶于所述下盘上并可受外力转动于所述下盘上的带有刻蚀孔的上盘、设于所述上盘与所述下盘之间在上盘受外力转动至预定位置时固定上盘位置的固定装置。