Silicon carbide semiconductor packaging detection device
The utility model belongs to the technical field of detection devices, and particularly relates to a silicon carbide semiconductor packaging detection device which comprises a base, a movable table and a microscope, the movable table is placed on the top of the base, an air cylinder is arranged on t...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model belongs to the technical field of detection devices, and particularly relates to a silicon carbide semiconductor packaging detection device which comprises a base, a movable table and a microscope, the movable table is placed on the top of the base, an air cylinder is arranged on the top of the movable table in the vertical direction, and a supporting frame is arranged on the top of the output end of the air cylinder. According to the utility model, the miniature electric push rod slowly pushes the clamping plates, so that a semiconductor package to be detected is clamped and fixed between the clamping plates, the appearance of the semiconductor package is observed to have mistaken cracks, dirt and the like through the microscope, and the second servo motor is started to drive the clamping plates to rotate, thereby facilitating the detection of the reverse side of the semiconductor package; and the overall height of the semiconductor package can be adjusted through the cylinder. When one sem |
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