Detection device for detecting vacuum performance of target material base of sputtering coating machine

The utility model provides a detection device for detecting vacuum performance of a target base of a sputtering coating machine, and belongs to the technical field of machinery. The problem that an existing detection device is low in detection speed is solved. The detection device comprises a box co...

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Bibliographische Detailangaben

Hauptverfasser:	WANG YING, LU ZHANGWU, ZHOU RONGBO, HUANG MIN, LI GONGJIAN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	MEASURING PHYSICS TESTING TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR
Online-Zugang:	Volltext bestellen
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