Detection device for detecting vacuum performance of target material base of sputtering coating machine

The utility model provides a detection device for detecting vacuum performance of a target base of a sputtering coating machine, and belongs to the technical field of machinery. The problem that an existing detection device is low in detection speed is solved. The detection device comprises a box cover, and after the box cover is opened, a target material base can be moved into a first inner cavity; one side of the detection box is provided with a through hole through which the belt extends out of the detection box; the driving mechanism is provided with a driving shaft and a belt pulley for connecting a belt, and the driving shaft is fixedly connected with the belt pulley and drives the belt pulley to rotate; the connecting pipe is mounted on the outer side of the detection box, the air guide channel is communicated with the first inner cavity, the connecting pipe is used for connecting an external air pipe, and the air guide channel is communicated with the air pipe; after the target material base moves int