Structure for recycling volatile gas through low-temperature condensation

A structure for recycling volatile gas through low-temperature condensation is formed by connecting a vacuum pump system, a three-stage compressor system and a low-temperature nitrogen condensation heat exchange system. The mixed waste gas is connected with an evacuation inlet of the vacuum pump sys...

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Bibliographische Detailangaben
Hauptverfasser: ZHA JUN, YU LI, SHAO BOZHI, TAN HONGBO, KOU XIPING
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:A structure for recycling volatile gas through low-temperature condensation is formed by connecting a vacuum pump system, a three-stage compressor system and a low-temperature nitrogen condensation heat exchange system. The mixed waste gas is connected with an evacuation inlet of the vacuum pump system and pumped into the vacuum pump; gas exhausted from the vacuum pump is cooled by a cooling fan of the air-cooled cooler and then enters the pre-compression buffer tank; an inlet of a third-stage compressor system is connected with an outlet of a buffer tank before compression, and gas subjected to third-stage compression intermediate cooling enters a double-pipe heat exchanger cooled by cold nitrogen and then is introduced into a high-pressure buffer tank before a cold box; gas in a high-pressure buffer tank in front of the cold box is conveyed to a low-temperature nitrogen condensation heat exchange system and is divided into two paths to pass through heat exchanger groups, and one path of heat exchanger group