Substrate bearing device

The utility model discloses a substrate bearing device which comprises a working table, the surface of the working table protrudes and forms a supporting part, the surface of the supporting part protrudes and forms a protruding part, and the protruding part is used for placing at least part of subst...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: CAI DANCHUN, ZHENG JUN, LI JIANCHENG
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:The utility model discloses a substrate bearing device which comprises a working table, the surface of the working table protrudes and forms a supporting part, the surface of the supporting part protrudes and forms a protruding part, and the protruding part is used for placing at least part of substrates except for the end parts so as to bear the substrates. According to the technical scheme, warped contact with the substrate can be avoided, meanwhile, the contact area with the substrate can be reduced, and therefore chippings generated by friction can be reduced, and the yield of products is improved. 本申请公开了一种基板承载装置,包括:工作台,表面凸起并形成支撑部,所述支撑部的表面凸起并形成凸起部,所述凸起部用于放置除端部以外的至少部分基板,以对所述基板进行承载。本申请的技术方案,能够避免与基板翘曲的接触,同时能够减少与基板的接触面积,从而能够减少因摩擦而产生的碎屑,进而提高产品的良品率。