Double-waterway joint component for vacuum coating

The utility model discloses a double-waterway joint component for vacuum coating, belongs to the technical field of vacuum evaporation coating, and aims to solve the problems that the mounting cost is increased and the mounting is inconvenient as a cooling water loop with large flow of an electronic...

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Bibliographische Detailangaben
Hauptverfasser:	XUE ZHAOMING, XUE HAI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BLASTING CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL JOINTS OR FITTINGS FOR PIPES LIGHTING MEANS FOR THERMAL INSULATION IN GENERAL MECHANICAL ENGINEERING METALLURGY PIPES SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION THERMAL INSULATION IN GENERAL WEAPONS
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Beschreibung
Zusammenfassung:	The utility model discloses a double-waterway joint component for vacuum coating, belongs to the technical field of vacuum evaporation coating, and aims to solve the problems that the mounting cost is increased and the mounting is inconvenient as a cooling water loop with large flow of an electronic gun and a cooling water loop with large flow of an ion source in the conventional vacuum coating can only be completed by adopting two independent flange water pieces. By adopting the design characteristics that the unique water inlet and outlet hole positions on the sealing flange, the water head part water inlet hole, the water head part water outlet hole position and the opening end of the water head part water inlet hole, and the water head part water outlet hole position and the opening end of the water head part water outlet hole form an included angle, the connection between two high-flow water heads and the sealing flange is ingeniously solved; and the water-gas sealing is very reliable during use, and the