Spill-proof structure of polishing machine and polishing machine
The embodiment of the utility model discloses an anti-overflow structure of a polishing machine and the polishing machine. The anti-overflow structure comprises a cover body, the cover body is provided with an anti-overflow groove and at least one water guide groove, the water guide groove is formed...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The embodiment of the utility model discloses an anti-overflow structure of a polishing machine and the polishing machine. The anti-overflow structure comprises a cover body, the cover body is provided with an anti-overflow groove and at least one water guide groove, the water guide groove is formed in one side of the anti-overflow groove, and the depth of the water guide groove is gradually increased in the direction close to the anti-overflow groove; the top face of the cover body comprises a first inclined face and a second inclined face, the first inclined face is the bottom face of the water guiding groove, the water guiding groove is formed in the second inclined face, and the height of the first inclined face and the height of the second inclined face are gradually reduced in the direction close to the anti-overflow groove. And the gradient of the first inclined surface is greater than that of the second inclined surface. The problem that liquid dripping from a wafer is prone to overflowing from the co |
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