High-precision heating vacuum adsorption platform

The utility model discloses a high-precision heating vacuum adsorption platform, which belongs to the field of adsorption platforms and comprises a panel, a vacuum cavity, a silica gel heating plate and a bottom plate, the panel is arranged below the vacuum cavity, the bottom plate is arranged above...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LU JIHAO, MA SHANGZHONG, MAO CHENG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model discloses a high-precision heating vacuum adsorption platform, which belongs to the field of adsorption platforms and comprises a panel, a vacuum cavity, a silica gel heating plate and a bottom plate, the panel is arranged below the vacuum cavity, the bottom plate is arranged above the vacuum cavity, and the silica gel heating plate is arranged between the vacuum cavity and the bottom plate. The panel, the vacuum cavity and the bottom plate are connected through screws, a plurality of rows of air suction holes are evenly distributed in the panel, vent grooves are evenly formed in the surface of the vacuum cavity, the positions of the vent grooves correspond to the positions of the air suction holes, sealing rubber rings are arranged on the peripheries of the vent grooves, and air suction holes are formed in the vent groove areas. A silica gel heating plate is arranged on the bottom surface of the bottom plate, heating wires are uniformly arranged in the silica gel heating plate, a junction b