Piezoelectric micromachined ultrasonic transducer (PMUT) device and electronic system
The embodiment of the utility model relates to a piezoelectric micromachined ultrasonic transducer (PMUT) device and an electronic system. A piezoelectric micro-machined ultrasonic transducer (PMUT) device is characterized by comprising a silicon substrate, a plurality of piezoelectric elements and...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The embodiment of the utility model relates to a piezoelectric micromachined ultrasonic transducer (PMUT) device and an electronic system. A piezoelectric micro-machined ultrasonic transducer (PMUT) device is characterized by comprising a silicon substrate, a plurality of piezoelectric elements and a plurality of piezoelectric elements, a membrane element configured to generate and receive ultrasonic waves by oscillating at a resonant frequency with respect to an equilibrium position; an electronic device includes a film element, a silicon substrate, an anchoring portion fixing the film element to the silicon substrate, and a piezoelectric element on the film element, the piezoelectric element configured to cause the film element to oscillate when an electrical signal is applied to the piezoelectric element, and to generate the electrical signal in response to the oscillation of the film element, in which the film element and the anchoring portion are made of monocrystalline silicon. According to the embodime |
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