Tail gas recovery system in polycrystalline silicon production

The utility model discloses a tail gas recovery system in polycrystalline silicon production, which belongs to the technical field of polycrystalline silicon production, and comprises an activated carbon adsorption column, a heat exchanger, a silicon powder filter and a collecting tank, the activate...

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Bibliographische Detailangaben
Hauptverfasser: YAN TAO, SONG LEI, XIANG CHUNLIN, TU DAYONG
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The utility model discloses a tail gas recovery system in polycrystalline silicon production, which belongs to the technical field of polycrystalline silicon production, and comprises an activated carbon adsorption column, a heat exchanger, a silicon powder filter and a collecting tank, the activated carbon adsorption column comprises an inner coil pipe, an outer coil pipe, a feed port and a discharge port, the inner coil pipe and the outer coil pipe are used for introducing hot water, and the heat exchanger comprises an inlet and an outlet. A hydrogen feeding hole, a tail gas inlet and a gas phase outlet are formed in the upper part of the silicon powder filter, a silicon powder discharging hole is formed in the bottom of the silicon powder filter, and a feeding hole I is formed in the upper part of the collecting tank; an emptying pipeline is arranged at the top; a solid outlet is formed in the bottom, the discharging port is communicated with the inlet, the outlet is communicated with the hydrogen feeding