MEMS piezoelectric actuator and loudspeaker

The utility model discloses an MEMS piezoelectric actuator and a loudspeaker, and relates to the MEMS loudspeaker technology field, the MEMS piezoelectric actuator comprises a carrier substrate which is provided with a first cavity penetrating along the axis direction of the carrier substrate; a diaphragm unit disposed on the carrier substrate; the piezoelectric unit is arranged on one side, opposite to the carrier substrate, of the vibrating diaphragm unit; the elastic piece is arranged in the first cavity, the stretching direction of the elastic piece is the same as the axis direction of the carrier substrate, and one end of the elastic piece is connected with the vibrating diaphragm unit. According to the actuator, the elastic piece does not need to be twisted and deformed when the actuator works. 本实用新型公开了一种MEMS压电执行器及扬声器，其涉及MEMS扬声器技术领域，所述MEMS压电执行器包括：载体衬底，所述载体衬底上具有沿其轴线方向贯穿的第一空腔；设置在所述载体衬底上的振膜单元；设置在所述振膜单元背向所述载体衬底一侧的压电单元；设置在所述第一空腔中的弹性件，所述弹性件的伸缩方向与所述载体衬底的轴线方向相同，所述弹性件的一端与所述振膜单元相连。本申请能够使得执行器工作时弹性件无需发生扭转形变。