Purification device for collecting semiconductor helium-containing waste gas

The utility model discloses a purification device for collecting semiconductor helium-containing waste gas, which comprises a box body, a partition plate, a support plate, a mounting plate, a drying plate, a first filtering mechanism, a second filtering mechanism and a cleaning mechanism, and the pa...

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Bibliographische Detailangaben
1. Verfasser: TAO YONGGUI
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The utility model discloses a purification device for collecting semiconductor helium-containing waste gas, which comprises a box body, a partition plate, a support plate, a mounting plate, a drying plate, a first filtering mechanism, a second filtering mechanism and a cleaning mechanism, and the partition plate, the support plate, the mounting plate and the drying plate are sequentially arranged in the box body from bottom to top; the partition plate, the supporting plate and the mounting plate sequentially divide the interior of the box body into a first filtering cavity, a second filtering cavity and a washing cavity from top to bottom, an organic solvent is contained in the washing cavity, the washing cavity is provided with a liquid discharging pipe penetrating through the box body, an air inlet pipe is arranged on the outer wall of one side of the box body, and an air outlet pipe is arranged at the top of the box body. According to the waste gas treatment device, waste gas enters the box body through th