Recovery device for helium after liquid helium cooling in photoetching machine field

The utility model relates to the field of photoetching machines, in particular to a recovery device for helium after liquid helium cooling in the field of photoetching machines, which comprises a cooling box and a box door hinged to the outer wall of one side of the cooling box, a mounting frame is mounted on the outer wall of the top of the cooling box, an air pump is mounted in the mounting frame, and the output end of the air pump is connected with a connecting pipe. The other end of the connecting pipe is connected with a collecting structure, air inlet assemblies are connected to the outer walls of the two sides of the cooling box, a sealing ring is welded to the outer wall of the side, close to the cooling box, of the box door, and the input end of an air pump communicates with the interior of the cooling box. Liquid helium in the cooling box floats upwards, filtered air is brought into the cooling box through the air inlet assemblies on the two sides of the cooling box, collected mixed gas is purified