Dust collecting device of chemical vapor deposition furnace
The utility model discloses a dust collection device of a chemical vapor deposition furnace, which comprises a dust collection head and a dust treatment box, an air inlet is fixedly arranged on the side ring surface of the dust treatment box and is fixedly connected with the dust collection head, an...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model discloses a dust collection device of a chemical vapor deposition furnace, which comprises a dust collection head and a dust treatment box, an air inlet is fixedly arranged on the side ring surface of the dust treatment box and is fixedly connected with the dust collection head, and a hopper-shaped dust collection box is fixedly arranged on the lower end surface of the dust treatment box and is fixedly connected with the dust collection head. A waste outlet pipe is fixedly installed on the lower end face of the hopper-shaped dust collecting box, a rotating motor is fixedly installed on the lower end face of the waste outlet pipe, the rotating motor is fixedly connected with a dust outlet screw rod, an air draft device is fixedly connected to the upper end of the dust treatment box, and an air outlet pipeline is fixedly connected to the air draft device. The upper end of the dust treatment box is vacuumized through the air draft device, negative pressure is formed by the dust collection head |
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