Specimen grabbing structure and specimen base
The utility model provides a specimen gripping structure and specimen base, relates to vacuum coating technical field, said specimen gripping structure includes specimen gripper and specimen tray, the specimen gripper is equipped with gripping hook, the specimen tray is equipped with the butt-joint...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model provides a specimen gripping structure and specimen base, relates to vacuum coating technical field, said specimen gripping structure includes specimen gripper and specimen tray, the specimen gripper is equipped with gripping hook, the specimen tray is equipped with the butt-joint hook that matches the gripping hook, the butt-joint hook is equipped with the butt-joint hook that matches the gripping hook. The grabbing hook is suitable for being in butt joint with the butt joint hook in a sleeved mode to limit sliding of the sample gripper relative to the sample disc, and a sample substrate is suitable for being placed in the sample disc. According to the sample grabbing structure, the grabbing hook is arranged on the sample grabbing hand, the butt joint hook is arranged on the sample disc, and the grabbing hook and the butt joint hook are locked in a rotating butt joint mode, so that compared with an existing vacuum suction grabbing hand and an existing electromagnetic suction grabbing hand, |
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